| Part Number | Specifications | Producent | Unit Price |
| PST16C | VACUUM PUMP ULVION SPUTTER ION 320I/SEC | Ulvac |
5656,00 EUR |
| 1005770 | PUMP | Ulvac |
2249,46 EUR |
| GLD201B | OIL SEALED ROTARY VACUUM PUMP | Ulvac |
1515,14 EUR |
| 1004175 | DIAPHRAGM PUMP 115V | Ulvac |
930,23 EUR |
| DAT40S115V | DIAPHRAGM PUMP 115V | Ulvac |
936,23 EUR |
| 1026908 | DIAPHRAGM PUMP 115V | Ulvac |
759,00 EUR |
| DA40S115V | DIAPHRAGM PUMP 115V | Ulvac |
746,00 EUR |
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